Report date: Dec 2,2025 Conflict count: 369596 Publisher: Elsevier Title count: 963 Conflict count: 17920 ========================================================== Created: 2004-12-15 01:52:16 ConfID: 4659394 CauseID: 137032350 OtherID: 46142130 JT: Microelectronic Engineering MD: ,,,,2004,Contents DOI: 10.1016/j.mee.2003.12.007(Journal) (4659394-N) DOI: 10.1016/j.mee.2004.07.010(Journal)